Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber
US-11603313-B2 · Mar 14, 2023 · US
Oxygen · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C01B2210/0045 |
| Official title | Oxygen |
| Display label | Oxygen |
| Total patents | 71 |
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 6 |
| 2016 | 6 |
| 2017 | 10 |
| 2018 | 8 |
| 2019 | 5 |
| 2020 | 14 |
| 2021 | 4 |
| 2022 | 6 |
| 2023 | 4 |
| 2024 | 4 |
| 2025 | 4 |
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
US-11603313-B2 · Mar 14, 2023 · US
US-2022401878-A1 · Dec 22, 2022 · US
US-11498691-B2 · Nov 15, 2022 · US
US-2022283575-A1 · Sep 8, 2022 · US
US-2022234000-A1 · Jul 28, 2022 · US
US-2022176313-A1 · Jun 9, 2022 · US
US-11305994-B2 · Apr 19, 2022 · US
US-2021278131-A1 · Sep 9, 2021 · US
US-11014039-B2 · May 25, 2021 · US
US-10960343-B2 · Mar 30, 2021 · US
US-10890369-B2 · Jan 12, 2021 · US
US-10874980-B2 · Dec 29, 2020 · US
US-2020378681-A1 · Dec 3, 2020 · US
US-10835856-B2 · Nov 17, 2020 · US
US-2020317360-A1 · Oct 8, 2020 · US
US-2020316519-A1 · Oct 8, 2020 · US
US-2020317361-A1 · Oct 8, 2020 · US
US-10767923-B2 · Sep 8, 2020 · US
US-10744450-B2 · Aug 18, 2020 · US
US-10703631-B2 · Jul 7, 2020 · US
Answers are generated from the same data shown on this page.