Steam treatment stations for chemical mechanical polishing system
US-12030093-B2 · Jul 9, 2024 · US
by boiling the liquid
by boiling the liquid · Cooperative Patent Classification (CPC)
Separating, mixing, shaping, printing, and transporting materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | B08B3/106 |
| Official title | {by boiling the liquid} |
| Display label | by boiling the liquid |
| Total patents | 77 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 6 |
| 2016 | 1 |
| 2017 | 5 |
| 2018 | 8 |
| 2019 | 9 |
| 2020 | 6 |
| 2021 | 4 |
| 2022 | 10 |
| 2023 | 9 |
| 2024 | 8 |
| 2025 | 7 |
| 2026 | 4 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Fluid vapor mixing and delivery system
US-2024091823-A1 · Mar 21, 2024 · US
Method of removing impurities from plastic
US-2023415381-A1 · Dec 28, 2023 · US
Bath Systems and Methods Thereof
US-2023356255-A1 · Nov 9, 2023 · US
Bath systems and methods thereof
US-11738363-B2 · Aug 29, 2023 · US
Semiconductor manufacturing device
US-11728188-B2 · Aug 15, 2023 · US
Steam cleaning of cmp components
US-2023249225-A1 · Aug 10, 2023 · US
Hyperbaric clean method and apparatus for cleaning semiconductor chamber components
US-11710647-B2 · Jul 25, 2023 · US
Unit for supplying liquid, apparatus and method for treating substrate with the unit
US-2023131576-A1 · Apr 27, 2023 · US
Steam cleaning of CMP components
US-11628478-B2 · Apr 18, 2023 · US
Unit for supplying liquid, apparatus and method for treating substrate with the unit
US-2023100773-A1 · Mar 30, 2023 · US
Wafer bath imaging
US-2022405902-A1 · Dec 22, 2022 · US
Acidic cleaner
US-2022396751-A1 · Dec 15, 2022 · US
Bath Systems and Methods Thereof
US-2022388022-A1 · Dec 8, 2022 · US
Steam treatment stations for chemical mechanical polishing system
US-2022388041-A1 · Dec 8, 2022 · US
Hot water generation method for chemical mechanical polishing
US-2022355440-A1 · Nov 10, 2022 · US
Steam treatment stations for chemical mechanical polishing system
US-11446711-B2 · Sep 20, 2022 · US
Acidic cleaner
US-11421191-B1 · Aug 23, 2022 · US
Hyperbaric clean method and apparatus for cleaning semiconductor chamber components
US-2022238355-A1 · Jul 28, 2022 · US
Method for treating substrate
US-2022139731-A1 · May 5, 2022 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC B08B3/106?
- CPC B08B3/106 is the Cooperative Patent Classification code for “by boiling the liquid.”
- How many patents are filed under CPC B08B3/106 (by boiling the liquid)?
- Our database includes 77 publications tagged with this CPC code.
- Is patent activity under CPC B08B3/106 growing?
- Publication counts under this code: 8 in 2024 vs 7 in 2025 (latest complete years).