Substrate handling apparatus and lithographic apparatus
US-9696633-B2 · Jul 4, 2017 · US
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Munnig Schmidt Robert-Han patents in 2017
Munnig Schmidt Robert-Han was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Munnig Schmidt Robert-Han |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Munnig Schmidt Robert-Han in 2017.
Top CPC classifications
Most common classification codes for Munnig Schmidt Robert-Han in 2017.
| CPC | Patents |
|---|---|
| B65G49/06 | 1 |
| B65G51/03 | 1 |
| B65H23/245 | 1 |
| B65H2406/311 | 1 |
| G03F7/20 | 1 |
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