Substrate handling apparatus and lithographic apparatus

Patent metadata

Field	Value
Publication number	US-9696633-B2
Application number	US-201113582725-A
Country	US
Kind code	B2
Filing date	Mar 14, 2011
Priority date	Apr 12, 2010
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A substrate handling apparatus for handling a substrate is disclosed. The substrate handling apparatus includes a substrate feeding device to feed the substrate towards an exposure area, a substrate receiving device to receive the substrate from the exposure area, and a substrate stabilization device to maintain, at least in the exposure area, the substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured for contactless stabilization of the flexible substrate.

First claim

What is claimed is:

1. A substrate handling apparatus for handling a flexible substrate, the substrate handling apparatus comprising:
a substrate feeding device to feed the flexible substrate towards an exposure area for exposing the substrate to a beam of radiation;
a substrate receiving device to receive the flexible substrate from the exposure area;
a substrate stabilization device to maintain, at least in the exposure area, the flexible substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured to create an essentially unidirectional flow of fluid that is located between a surface of the flexible substrate and a surface of the substrate stabilization device and that extends for a majority of the exposure area; and
a control system configured to enable substantially contactless stabilization of the flexible substrate at least in the exposure area during a time of movement of the substrate relative to and across the substrate stabilization device.

2. The substrate handling apparatus of claim 1 , wherein the substrate stabilization device comprises a substantially contactless clamp using the Bernoulli effect.

3. The substrate handling apparatus of claim 1 , wherein at least part of the surface of the substrate stabilization device located in the exposure area comprises a plurality of cells, each cell having an inlet opening for supply of fluid and an outlet opening for removal of fluid.

4. The substrate handling apparatus of claim 3 , wherein the inlet opening and outlet opening are, positioned with respect to each other such that the fluid will flow in a direction of the movement of the substrate.

5. The substrate handling apparatus of claim 3 , wherein the at least part of the surface of the substrate stabilization device in the exposure area is movable to adjust the flexible substrate to an optimal image plane.

6. The substrate handling apparatus of claim 3 , wherein the cells are uniformly distributed over the at least part of the surface of the substrate stabilization device in the exposure area such that during use several cells operate simultaneously to provide the substrate with traction.

7. The substrate handling apparatus of claim 3 , wherein the control system is arranged to control supply of fluid to the inlet opening and discharge of fluid from the outlet opening of the cells on the basis of an actual height and/or tilt of the substrate in comparison with an exposure height and/or tilt.

8. The substrate handling apparatus of claim 1 , further comprising a first underpressure clamping device at the substrate feeding device side of the exposure area and a second underpressure clamping device at the substrate receiving device side of the exposure area to maintain a tension in the substrate in the exposure area.

9. The substrate handling apparatus of claim 1 , further comprising a sensor to measure a height, tilt and/or position of the substrate.

10. The substrate handling apparatus of claim 1 , wherein the essentially unidirectional flow of fluid is a first essentially unidirectional flow of fluid and the substrate stabilization device is configured to create a second essentially unidirectional flow of fluid that is located between the surface of the substrate and the surface of the substrate stabilization device, wherein the second essentially unidirectional flow extends for a separate area of the surface of the substrate than the first essentially unidirectional flow of fluid and the second essentially unidirectional flow has a directional component perpendicular to the flow direction of the first essentially unidirectional flow of fluid.

11. A substrate handling apparatus, comprising:
a substrate feeding device to feed a substrate towards an exposure area for exposing the substrate to a beam of radiation;
a substrate receiving device to receive the substrate from the exposure area;
a substrate stabilization device to maintain, at least in the exposure area, the substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured to create a plurality of essentially unidirectional flows of fluid that are located between a surface of the substrate and a surface of the substrate stabilization device and that extend for respective separate areas of the surface of the substrate, wherein at least a first essentially unidirectional flow of the plurality of essentially unidirectional flows is directed essentially parallel to a direction of movement of the substrate relative to the substrate stabilization device and at least a second essentially unidirectional flow of the plurality of essentially unidirectional flows has a directional component perpendicular to the at least first essentially unidirectional flow; and
a control system configured to enable substantially contactless stabilization of the substrate at least in the exposure area during a time of movement of the substrate relative to and across the substrate stabilization device in the direction of movement.

12. The substrate handling apparatus of claim 4 , wherein the substrate stabilization device comprises a substantially contactless clamp using the Bernoulli effect.

13. The substrate handling apparatus of claim 11 , wherein at least part of the surface of the substrate stabilization device located in the exposure area comprises a plurality of cells, each cell having an inlet opening for supply of fluid and an outlet opening for removal of fluid.

14. A lithographic apparatus comprising:
a substrate handling apparatus, comprising:
a substrate feeding device to feed a substrate towards an exposure area for exposing the substrate to a beam of radiation,
a substrate receiving device to receive the substrate from the exposure area,
a substrate stabilization device to maintain, at least in the exposure area, the substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured to create an essentially unidirectional flow of fluid that is located between a surface of the substrate and a surface of the substrate stabilization device and that extends for a majority of the exposure area; and
a control system configured to enable substantially contactless stabilization of the substrate at least in the exposure area during a time of movement of the substrate relative to and across the substrate stabilization device; and

an optical column to project a beam of radiation on a target portion of the substrate at the exposure area.

15. The lithographic apparatus of claim 14 , wherein the substrate stabilization device comprises a substantially contactless clamp using the Bernoulli effect.

16. The lithographic apparatus of claim 14 , wherein at least part of the surface of the substrate stabilization device located in the exposure area comprises a plurality of cells, each cell having an inlet opening for supply of fluid and an outlet opening for removal of fluid.

17. A tool having:
a first reel;
a second reel; and
a substrate stabilization device between the first and second reels, the substrate stabilization device configured to supply a fluid flow between the substrate stabilization device and a substrate to generate an underpressure in accordance with the Bernoulli effect to stabilize the substrate between the reels when the substrate is in contact with the reels and during a time of movement of the substrate relative to and across the substrate stabilization device, wherein the substrate stabilization device is configured to create a plurality of essentially unidirectional flows of flui

Assignees

• Onvlee Johannes
• Munnig Schmidt Robert-Han
• Asml Netherlands Bv

Inventors

• Onvlee Johannes
• Munnig Schmidt Robert-Han

Classifications

• H10P72/70

  for supporting or gripping · CPC title

• G03F7/70583

  Speckle reduction, e.g. coherence control or amplitude/wavefront splitting · CPC title

• G03F7/70283

  Mask effects on the imaging process · CPC title

• G03F7/70258 Primary

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G03F7/70775

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title