Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate
US-8993201-B2 · Mar 31, 2015 · US
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Mikami Masaki patents
Mikami Masaki holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Jan 6, 2015 |
| Latest publication | Mar 31, 2015 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2015 | 3 |
| Year | Patents |
|---|---|
| 2015 | 3 |
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate
US-8993201-B2 · Mar 31, 2015 · US
Optical member for EUV lithography
US-8986910-B2 · Mar 24, 2015 · US
Optical member for EUV lithography, and process for production of reflective layer-equipped substrate
US-8927179-B2 · Jan 6, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| B82Y10/00 | 3 |
| G03F7/70958 | 3 |
| B82Y40/00 | 3 |
| G03F1/24 | 3 |
| G02B5/0891 | 3 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Operations & Transport | 3 |
| Physics | 3 |
| Electricity | 3 |