Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
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Morimoto Shigeru — Physics
Morimoto Shigeru holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Morimoto Shigeru |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking Morimoto Shigeru to Physics.
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Recent filings
Latest patents from Morimoto Shigeru in Physics.
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
Linear motor, stage apparatus, and exposure apparatus
US-9804508-B2 · Oct 31, 2017 · US
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