Linear motor, stage apparatus, and exposure apparatus

Patent metadata

Field	Value
Publication number	US-9804508-B2
Application number	US-66441605-A
Country	US
Kind code	B2
Filing date	Sep 30, 2005
Priority date	Oct 1, 2004
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member ( 142 ) and facing a flow passage ( 142 a ) of a liquid for regulating temperature, and is provided with a coil unit ( 141 ) having at least a part thereof in contact with the liquid. The coil unit ( 141 ) is provided with a coil body ( 144 ), a mold layer ( 143 ) that covers the coil body and holds it in specific form, and a liquid protection layer ( 150 ) that covers the mold layer ( 143 ) and has liquid protection properties.

First claim

The invention claimed is:

1. A linear motor comprising:
a coil unit disposed in a surrounding member and facing a flow passage of a liquid for regulating temperature, and at least a part of a surface of the coil unit being in contact with the liquid, wherein
the coil unit comprises a coil body, a mold layer that covers the coil body and retains a specific form thereof, and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties, and
a lead unit leading a wiring of the coil body from the coil unit installed separate from the flow passage of the liquid so that the lead unit has no contact with a liquid that flows through the passage, and wherein
the coil unit has a sealing portion that is in contact with the surrounding member, the wiring extends from the coil unit toward an outside of the surrounding member via the sealing portion, and wherein
a wiring passing portion through which the wiring passes is provided on the sealing portion, and
a sealing member is provided at a periphery of the wiring passing portion and between the sealing portion and the surrounding member.

2. The linear motor according to claim 1 , wherein
the sealing portion and the sealing member are in contact with an inner surface of the surrounding member.

3. The linear motor according to claim 2 , wherein
the sealing portion is in contact with an inner surface of the surrounding member via no liquid protection layer.

4. The linear motor according to claim 1 , wherein
the sealing portion is provided on a part of the mold layer.

5. The linear motor according to claim 1 , wherein
the surrounding member has a wiring output through which the wiring from the lead unit is extracted, the wiring output being waterproofed.

6. The linear motor according to claim 1 , wherein
a thin plating different from the mold layer is provided between the liquid protection layer and the coil body.

7. The linear motor according to claim 1 , wherein
the mold layer is formed by epoxy resin, and
the liquid protection layer is formed by at least one of polyurethane resin, flouroresin, silicone resin, and an inorganic oxide film.

8. A stage apparatus wherein the linear motor according to claim 1 is used as a drive device.

9. An exposure apparatus that exposes a substrate with a pattern on a mask, wherein the mask has been carried from an outside and has been held on a mask stage apparatus,
the substrate has been carried from an outside and has been held on a substrate stage apparatus, and
the stage apparatus according to claim 8 is used in at least one of the mask stage apparatus and the substrate stage apparatus.

10. A device fabricating method that comprises a lithographic process, wherein a device pattern is formed on a substrate in the lithographic process using the exposure apparatus according to claim 9 .

11. A method for fabricating a linear motor,
wherein the linear motor comprises a coil unit disposed in a surrounding member and facing a flow passage of a liquid for regulating temperature, and at least a part of a surface of the coil unit being in contact with the liquid,
the method comprising:
providing the coil unit, the coil unit comprising a coil body, a mold layer that covers the coil body and retains a specific form thereof, and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties;
providing a lead unit that leads a wiring of the coil body from the coil unit, the coil unit being installed separate from the flow passage of the liquid so that the lead unit has no contact with a liquid that flows through the passage;
providing a sealing portion on the coil unit, the coil unit being in contact with the surrounding member, and bringing the wiring from the coil unit to an outside of the surrounding member via the sealing portion; and
providing a wiring passing portion through which the wiring passes, on the sealing portion, in order to provide a sealing member at a periphery of the wiring passing portion and between the sealing portion and the surrounding member.

12. The method according to claim 11 , further comprising:
arranging the sealing portion and the sealing member to be in contact with an inner surface of the surrounding member.

13. The method according to claim 11 , further comprising:
providing the sealing portion on a part of the mold layer.

14. A method for manufacturing a stage apparatus that comprises a mover and a drive apparatus that drives the mover, the method comprising:
providing a linear motor that has been fabricated as the drive apparatus using the method according to claim 11 .

15. A method for manufacturing an exposure apparatus that exposes a substrate with a pattern on a mask,
wherein the mask has been carried from an outside and has been held on a mask stage apparatus, the substrate has been carried from an outside and has been held on a substrate stage apparatus,
the method comprising:
manufacturing at least one of the mask stage apparatus and the substrate stage apparatus using the method for manufacturing a stage apparatus according to claim 14 .

16. A device fabricating method that comprises a lithographic process, wherein a device pattern is formed on a substrate in the lithographic process using the exposure apparatus that has been manufactured by the manufacturing method according to claim 15 .

17. A device fabricating method comprising:
holding a mask with a mask stage apparatus, the mask having been carried from an outside;
holding a substrate with a substrate stage apparatus, the substrate having been carried from an outside;
relatively moving the mask stage apparatus and the substrate stage apparatus; and
irradiating the mask with an exposure light during the relative movement and projecting an image of a pattern formed on the mask onto the substrate,
wherein the mask stage apparatus or the substrate stage apparatus has a linear motor as a drive apparatus for the relative movement, the linear motor having a coil unit, the coil unit disposed in a surrounding member and facing a flow passage of a liquid for regulating temperature, at least a part of a surface of the coil unit being in contact with the liquid,
the coil unit comprises a coil body, a mold layer that covers the coil body and retains a specific form thereof, and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties,
a lead unit leading a wiring of the coil body from the coil unit is installed separate from the flow passage of the liquid so that the lead unit has no contact with a liquid that flows through the passage, and wherein
the coil unit has a sealing portion that is in contact with the surrounding member, the wiring extends from the coil unit toward an outside of the surrounding member via the sealing portion, and wherein
a wiring passing portion through which the wiring passes is provided on the sealing portion, and
a sealing member is provided at a periphery of the wiring passing portion and between the sealing portion and the surrounding member.

18. A linear motor comprising:
a coil unit having (a) a coil body, (b) a mold layer that covers the coil body and (c) a liquid protection layer that has liquid protection properties with respect to the liquid and is disposed on a surface of the mold layer;
a surrounding member having an internal space for accommodating the coil unit, while the coil unit is

Assignees

• Morimoto Shigeru
• Kominami Tadahiro
• Nikon Corp

Inventors

• Morimoto Shigeru
• Kominami Tadahiro

Classifications

• H02K9/197

  in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator · CPC title

• G03F7/70758 Primary

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/70716

  Stages · CPC title

• H02K2201/18

  Machines moving with multiple degrees of freedom · CPC title

• H02K16/00

  Machines with more than one rotor or stator {(machines for transmitting mechanical power from a driving shaft to a driven shaft and comprising structurally interrelated motor and generator parts H02K51/00; permanent magnet machines with multiple rotors or stators relatively rotated for vectorially combining the excitation fields or the armature voltages H02K21/029)} · CPC title