Systems and methods for substrate polishing end point detection using improved friction measurement
US-9862070-B2 · Jan 9, 2018 · US
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Chen Hung patents
Chen Hung holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Mar 3, 2015 |
| Latest publication | Jan 9, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Systems and methods for substrate polishing end point detection using improved friction measurement
US-9862070-B2 · Jan 9, 2018 · US
High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods
US-9119461-B2 · Sep 1, 2015 · US
Methods and apparatus for pre-chemical mechanical planarization buffing module
US-8968055-B2 · Mar 3, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P70/60 | 1 |
| H01L21/02096 | 1 |
| A46B13/001 | 1 |
| A46B3/005 | 1 |
| Y02E10/50 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Operations & Transport | 2 |
| Electricity | 2 |
| Human Necessities | 1 |
| Cross-Sectional Technologies | 1 |