Heating apparatus and substrate processing apparatus having the same
US-2017218507-A1 · Aug 3, 2017 · US
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Sungkyunkwan University'S Res & Business Found patents
Sungkyunkwan University'S Res & Business Found holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Jun 27, 2017 |
| Latest publication | Aug 3, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2017 | 2 |
| Year | Patents |
|---|---|
| 2017 | 2 |
Recent patents
Latest publications where this party is an assignee.
Pellicles and methods of manufacturing the same
US-9690190-B2 · Jun 27, 2017 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Heating apparatus and substrate processing apparatus having the same
US-2017218507-A1 · Aug 3, 2017 · US
Pellicles and methods of manufacturing the same
US-9690190-B2 · Jun 27, 2017 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 2 |
| Mechanical Engineering | 1 |
| Physics | 1 |
| Electricity | 1 |