Method for depositing an aluminium nitride layer
US-9607831-B2 · Mar 28, 2017 · US
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Oerlikon Advanced Tech Ag patents in 2017
Oerlikon Advanced Tech Ag was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Oerlikon Advanced Tech Ag |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Oerlikon Advanced Tech Ag in 2017.
Top CPC classifications
Most common classification codes for Oerlikon Advanced Tech Ag in 2017.
| CPC | Patents |
|---|---|
| C30B25/06 | 1 |
| C30B25/186 | 1 |
| C30B29/403 | 1 |
| H01L21/02381 | 1 |
| H01L21/02433 | 1 |
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