Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
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Tallavarjula Sairaju — Physics
Tallavarjula Sairaju holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Tallavarjula Sairaju |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2018 |
| Last year | 2018 |
Representative patents
Notable publications linking Tallavarjula Sairaju to Physics.
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Recent filings
Latest patents from Tallavarjula Sairaju in Physics.
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
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