Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
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Herrin Russell T — Physics
Herrin Russell T holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Herrin Russell T |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Herrin Russell T to Physics.
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Methods of manufacture for micro-electro-mechanical system (MEMS)
US-9330856-B2 · May 3, 2016 · US
Recent filings
Latest patents from Herrin Russell T in Physics.
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Methods of manufacture for micro-electro-mechanical system (MEMS)
US-9330856-B2 · May 3, 2016 · US
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