Run-to-run control utilizing virtual metrology in semiconductor manufacturing
US-9240360-B2 · Jan 19, 2016 · US
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Zhu Yada patents in 2016
Zhu Yada was listed as an assignee on 1 patent publication in 2016.
| Metric | Value |
|---|---|
| Company | Zhu Yada |
| Year | 2016 |
| Patents | 1 |
Patents
Representative publications for Zhu Yada in 2016.
Top CPC classifications
Most common classification codes for Zhu Yada in 2016.
| CPC | Patents |
|---|---|
| G05B13/048 | 1 |
| G05B19/41875 | 1 |
| G05B2219/32182 | 1 |
| G05B2219/32187 | 1 |
| G05B2219/32194 | 1 |
Related pages
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