Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device
US-9466477-B2 · Oct 11, 2016 · US
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Kaga Yukinao patents
Kaga Yukinao holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Jun 2, 2015 |
| Latest publication | Oct 11, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device
US-9466477-B2 · Oct 11, 2016 · US
Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus
US-9238257-B2 · Jan 19, 2016 · US
Method of forming metal-containing film
US-9045825-B2 · Jun 2, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P14/6938 | 2 |
| H10P14/40 | 2 |
| H10P14/6339 | 2 |
| C23C16/45544 | 2 |
| C23C16/52 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 3 |
| Electricity | 3 |
| Operations & Transport | 1 |