Method for forming hydrogen-containing carbon film using pecvd
US-2025215556-A1 · Jul 3, 2025 · US
This page is not indexed by search engines while we improve data quality.
Tes Co Ltd — Physics
Tes Co Ltd holds 6 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Tes Co Ltd |
| Technology | Physics |
| Patents in slice | 6 |
| Recent patents in slice | 6 |
| First year | 2023 |
| Last year | 2025 |
Representative patents
Notable publications linking Tes Co Ltd to Physics.
Substrate monitoring method and substrate processing apparatus
US-2025183075-A1 · Jun 5, 2025 · US
Substrate processing apparatus and substrate processing method
US-2024370041-A1 · Nov 7, 2024 · US
Process detecting unit, substrate processing apparatus and substrate process monitoring method
US-2024178023-A1 · May 30, 2024 · US
Substrate supporting unit and temperature control method thereof
US-2023376055-A1 · Nov 23, 2023 · US
Recent filings
Latest patents from Tes Co Ltd in Physics.
Method for forming hydrogen-containing carbon film using pecvd
US-2025215556-A1 · Jul 3, 2025 · US
Substrate monitoring method and substrate processing apparatus
US-2025183075-A1 · Jun 5, 2025 · US
Substrate processing apparatus and substrate processing method
US-2024370041-A1 · Nov 7, 2024 · US
Process detecting unit, substrate processing apparatus and substrate process monitoring method
US-2024178023-A1 · May 30, 2024 · US
Substrate supporting unit and temperature control method thereof
US-2023376055-A1 · Nov 23, 2023 · US
Related pages
Navigate to parent entity pages.