Process chamber having separate process gas and purge gas regions
US-9870919-B2 · Jan 16, 2018 · US
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Ramachandran Balasubramanian patents
Ramachandran Balasubramanian holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Sep 8, 2015 |
| Latest publication | Jan 16, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Optical endpoint detection system
US-9347132-B2 · May 24, 2016 · US
Epitaxial chamber with cross flow
US-9127360-B2 · Sep 8, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Process chamber having separate process gas and purge gas regions
US-9870919-B2 · Jan 16, 2018 · US
Optical endpoint detection system
US-9347132-B2 · May 24, 2016 · US
Epitaxial chamber with cross flow
US-9127360-B2 · Sep 8, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P14/24 | 2 |
| H01L21/0262 | 2 |
| H10P72/0604 | 1 |
| B08B3/10 | 1 |
| G01N2021/8416 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 2 |
| Operations & Transport | 1 |
| Physics | 1 |