Method and apparatus to determine a patterning process parameter
US-2020013685-A1 · Jan 9, 2020 · US
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Cramer Hugo Augustinus Joseph patents
Cramer Hugo Augustinus Joseph holds 5 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 5 |
| Recent patents | 0 |
| First publication | Jul 14, 2015 |
| Latest publication | Jan 9, 2020 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus
US-9977340-B2 · May 22, 2018 · US
Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cell
US-9188875-B2 · Nov 17, 2015 · US
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
US-9182682-B2 · Nov 10, 2015 · US
Methods and scatterometers, lithographic systems, and lithographic processing cells
US-9081303-B2 · Jul 14, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and apparatus to determine a patterning process parameter
US-2020013685-A1 · Jan 9, 2020 · US
Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus
US-9977340-B2 · May 22, 2018 · US
Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cell
US-9188875-B2 · Nov 17, 2015 · US
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
US-9182682-B2 · Nov 10, 2015 · US
Methods and scatterometers, lithographic systems, and lithographic processing cells
US-9081303-B2 · Jul 14, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/70625 | 4 |
| G03F7/70633 | 4 |
| G03F7/20 | 2 |
| G03F7/70683 | 2 |
| G03F7/706847 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 5 |
| Electricity | 3 |
| Cross-Sectional Technologies | 1 |