AVD hardmask for damascene patterning
US-9502281-B2 · Nov 22, 2016 · US
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Childs Michael A patents in 2016
Childs Michael A was listed as an assignee on 1 patent publication in 2016.
| Metric | Value |
|---|---|
| Company | Childs Michael A |
| Year | 2016 |
| Patents | 1 |
Patents
Representative publications for Childs Michael A in 2016.
Top CPC classifications
Most common classification codes for Childs Michael A in 2016.
| CPC | Patents |
|---|---|
| H01L21/311 | 1 |
| H01L21/31144 | 1 |
| H01L21/76802 | 1 |
| H01L21/76807 | 1 |
| H01L23/49827 | 1 |
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