Electrostatic carrier for handling substrates for processing
US-9740111-B2 · Aug 22, 2017 · US
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Thirunavukarasu Sriskantharajah patents in 2017
Thirunavukarasu Sriskantharajah was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Thirunavukarasu Sriskantharajah |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Thirunavukarasu Sriskantharajah in 2017.
Top CPC classifications
Most common classification codes for Thirunavukarasu Sriskantharajah in 2017.
| CPC | Patents |
|---|---|
| G03F7/70708 | 1 |
| G03F7/70733 | 1 |
| H01L21/6833 | 1 |
| H10P72/72 | 1 |
| H10P72/722 | 1 |
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