Electrostatic carrier for handling substrates for processing

Patent metadata

Field	Value
Publication number	US-9740111-B2
Application number	US-201414280102-A
Country	US
Kind code	B2
Filing date	May 16, 2014
Priority date	May 16, 2014
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

An electrostatic carrier is described for carrying a substrate for handling through different processes. The carrier has a dielectric plate having a top side and a bottom side and configured to be attached on a top side of the plate to a substrate using electrostatic force, and a base plate coupled to a bottom side of the dielectric plate. Electrodes are formed on the base plate and extend across the base plate parallel to the top side of the dielectric plate. The electrodes are configured to carry an electrostatic charge and formed so that electrodes of a first charge are positioned near electrodes of a second charge. Connectors extend through the base plate to the electrodes to couple the electrodes to a source of electrostatic charge.

First claim

What is claimed is:

1. A carrier to carry a substrate for processing, the carrier comprising:
a dielectric top plate having a top side and a bottom side and configured to be attached on a top side of the plate to a substrate using electrostatic force;
a dielectric base plate coupled to a bottom side of the dielectric plate, the base plate having a bottom side that is configured to be carried by a chuck;
electrodes between the dielectric base plate and the dielectric top plate and extending across the base plate parallel to the top side of the top dielectric plate, the electrodes configured to carry an electrostatic charge between the base plate and the top plate and formed so that electrodes of a first charge are positioned near electrodes of a second charge; and
connectors extending from the bottom side through the base plate to the electrodes to couple the electrodes to a source of electrostatic charge through the bottom side, the connectors being configured to be covered when the carrier is carried by a chuck.

2. The carrier of claim 1 , wherein the base plate comprises a ceramic disk and the electrodes are formed over the ceramic so that the electrodes are adjacent to the ceramic.

3. The carrier of claim 1 , wherein the base plate comprises a ceramic bottom plate and a polymer top plate and wherein the electrodes are formed on the polymer top plate.

4. The carrier of claim 1 , wherein the base plate comprises an amorphous bottom plate and a polymer top plate and wherein the electrodes are, formed on the polymer top plate.

5. The carrier of claim 4 , wherein the amorphous bottom plate is formed of a glass and the polymer top plate is formed of a silicon.

6. The carrier of claim 4 , further comprising an embedded capacitor between the bottom plate and the top plate.

7. The carrier of claim 1 , wherein the electrodes form interdigitated parallel lines of positive and negative charge.

8. The carrier of claim 1 , wherein the electrodes form an arc around the periphery of the base plate with parallel lines extending from the arc across the base plate and wherein the parallel lines are interdigitated.

9. The carrier of claim 7 , wherein the parallel lines include spurs extending from the parallel lines, the spurs of one electrode extending between spurs of another electrode on either side of the one electrode.

10. The carrier of claim 7 , wherein the spurs extend from the parallel lines at an angle offset from orthogonal.

11. The carrier of claim 1 , wherein the substrate is a thinned silicon wafer and the processing is semiconductor processing in a processing chamber.

12. A method of making a carrier to carry a substrate for processing, the method comprising:
depositing a conductive layer over a substrate;
patterning the conductive layer into positive and negative electrodes;
depositing a dielectric layer over the conductive layer and the substrate; and
depositing a ceramic layer over the dielectric layer.

13. The method of claim 12 , further comprising depositing a dielectric layer over the substrate before depositing the conductive layer.

14. The method of claim 12 , wherein depositing a conductive layer comprises applying a metal layer by chemical vapor deposition and polishing the metal layer by chemical mechanical polishing.

15. The method of claim 12 , wherein pattering the conductive layer comprises applying a photoresist, patterning the photoresist, and etching the conductive layer to form the pattern.

16. The method of claim 12 , wherein depositing a ceramic layer comprises depositing aluminum nitride by chemical vapor deposition.

17. The method of claim 16 , further comprising polishing the aluminum nitride.

18. A wafer carrier for semiconductor processing, the carrier comprising:
a base plate having a first and second dielectric layers and a capacitor layer between the first and second dielectric layers;
a plurality of interdigitated electrodes formed over the first dielectric layer, the electrodes to carry an electrostatic charge so that the interdigitated electrodes alternate between positive and negative charge when charged;
a ceramic plate over the top dielectric layer of the base plate having a top surface configured to carry a silicon wafer.

19. The wafer carrier of claim 18 , wherein the ceramic plate is formed of aluminum nitride by chemical vapor deposition over the top dielectric layer.

20. The wafer carrier of claim 18 , wherein the electrodes are formed by depositing a metal layer over the top dielectric layer and patterning the metal layer using photolithography.

Assignees

• Sundarrajan Arvind
• Lew Jen Sern
• Thirunavukarasu Sriskantharajah
• Elumalai Karthik
• Applied Materials Inc

Inventors

• Sundarrajan Arvind
• Lew Jen Sern
• Thirunavukarasu Sriskantharajah
• Elumalai Karthik

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• G03F7/70733 Primary

  Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask · CPC title

• H01L21/6833

  Electricity · mapped topic

• G03F7/70708

  being electrostatic; Electrostatically deformable vacuum chucks · CPC title

• H10P72/72

  using electrostatic chucks · CPC title