Methods of preventing plasma induced damage during substrate processing
US-9399812-B2 · Jul 26, 2016 · US
Xie Zhigang holds 1 patent in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Xie Zhigang |
| Technology | Electricity |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Notable publications linking Xie Zhigang to Electricity.
Latest patents from Xie Zhigang in Electricity.
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