Method and system for providing a quality metric for improved process control
US-11372340-B2 · Jun 28, 2022 · US
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Levinski Vladimir patents
Levinski Vladimir holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Jul 14, 2015 |
| Latest publication | Jun 28, 2022 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
US-9927718-B2 · Mar 27, 2018 · US
Illuminating a specimen for metrology or inspection
US-9080991-B2 · Jul 14, 2015 · US
Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
US-9080990-B2 · Jul 14, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and system for providing a quality metric for improved process control
US-11372340-B2 · Jun 28, 2022 · US
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
US-9927718-B2 · Mar 27, 2018 · US
Illuminating a specimen for metrology or inspection
US-9080991-B2 · Jul 14, 2015 · US
Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
US-9080990-B2 · Jul 14, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G01N21/9501 | 2 |
| G01N2021/479 | 2 |
| G03F7/70633 | 2 |
| H10P72/53 | 1 |
| G03F9/7088 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 4 |
| Electricity | 1 |