Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
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Patel Hrishikesh — Physics
Patel Hrishikesh holds 2 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Patel Hrishikesh |
| Technology | Physics |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking Patel Hrishikesh to Physics.
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Recent filings
Latest patents from Patel Hrishikesh in Physics.
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
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