Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
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Higashihara Go — Physics
Higashihara Go holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Higashihara Go |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Higashihara Go to Physics.
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Recent filings
Latest patents from Higashihara Go in Physics.
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
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