Method for forming thin film while providing cooling gas to rear surface of substrate
US-9045819-B2 · Jun 2, 2015 · US
Suetsugu Daisuke holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Mar 31, 2015 |
| Latest publication | Jun 2, 2015 |
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2015 | 2 |
| Year | Patents |
|---|---|
| 2015 | 2 |
Latest publications where this party is an assignee.
Representative or frequently cited publications from precomputed assignee stats.
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| C03B19/02 | 1 |
| B22D11/045 | 1 |
| C01B33/02 | 1 |
| C23C14/562 | 1 |
| C23C14/541 | 1 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 2 |
| Operations & Transport | 1 |