Lithographic apparatus having a chuck with a visco-elastic damping layer
US-8928860-B2 · Jan 6, 2015 · US
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Bijvoet Dirk-Jan — Physics
Bijvoet Dirk-Jan holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Bijvoet Dirk-Jan |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2015 |
Representative patents
Notable publications linking Bijvoet Dirk-Jan to Physics.
Recent filings
Latest patents from Bijvoet Dirk-Jan in Physics.
Lithographic apparatus having a chuck with a visco-elastic damping layer
US-8928860-B2 · Jan 6, 2015 · US
Lithographic apparatus having a chuck with a visco-elastic damping layer
US-8928860-B2 · Jan 6, 2015 · US
Lithographic apparatus having a chuck with a visco-elastic damping layer
US-8928860-B2 · Jan 6, 2015 · US
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