Fabrication of a silicon structure and deep silicon etch with profile control
US-9330926-B2 · May 3, 2016 · US
Rusu Camelia was listed as an assignee on 2 patent publications in 2016.
| Metric | Value |
|---|---|
| Company | Rusu Camelia |
| Year | 2016 |
| Patents | 2 |
Representative publications for Rusu Camelia in 2016.
Most common classification codes for Rusu Camelia in 2016.
| CPC | Patents |
|---|---|
| H01L21/30655 | 2 |
| H10P50/244 | 2 |
| F16K3/0209 | 1 |
| H01J2237/334 | 1 |
| H01J37/32009 | 1 |
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