Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
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Moriya Masato — Physics
Moriya Masato holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Moriya Masato |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Moriya Masato to Physics.
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Light source apparatus and data processing method
US-2015168848-A1 · Jun 18, 2015 · US
Recent filings
Latest patents from Moriya Masato in Physics.
Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Light source apparatus and data processing method
US-2015168848-A1 · Jun 18, 2015 · US
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