PEALD of films comprising silicon nitride
US-9984868-B2 · May 29, 2018 · US
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Witty Derek R patents in 2018
Witty Derek R was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Witty Derek R |
| Year | 2018 |
| Patents | 1 |
Patents
Representative publications for Witty Derek R in 2018.
Top CPC classifications
Most common classification codes for Witty Derek R in 2018.
| CPC | Patents |
|---|---|
| C23C16/045 | 1 |
| C23C16/345 | 1 |
| C23C16/45542 | 1 |
| C23C16/56 | 1 |
| H01L21/0217 | 1 |
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