Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
US-9865438-B2 · Jan 9, 2018 · US
Nguyen Huy Q holds 2 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Nguyen Huy Q |
| Technology | Physics |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2018 |
Notable publications linking Nguyen Huy Q to Physics.
US-9865438-B2 · Jan 9, 2018 · US
US-9865438-B2 · Jan 9, 2018 · US
US-9865438-B2 · Jan 9, 2018 · US
US-9865438-B2 · Jan 9, 2018 · US
US-8965751-B2 · Feb 24, 2015 · US
Latest patents from Nguyen Huy Q in Physics.
US-9865438-B2 · Jan 9, 2018 · US
US-9865438-B2 · Jan 9, 2018 · US
US-9865438-B2 · Jan 9, 2018 · US
US-9865438-B2 · Jan 9, 2018 · US
US-8965751-B2 · Feb 24, 2015 · US
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