Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber
US-9153421-B2 · Oct 6, 2015 · US
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Booth Jean-Paul patents
Booth Jean-Paul holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Mar 3, 2015 |
| Latest publication | Oct 6, 2015 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2015 | 3 |
| Year | Patents |
|---|---|
| 2015 | 3 |
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber
US-9153421-B2 · Oct 6, 2015 · US
Processing system for detecting in-situ arcing events during substrate processing
US-9129779-B2 · Sep 8, 2015 · US
Plasma processing in a capacitively-coupled reactor with trapezoidal-waveform excitation
US-8968838-B2 · Mar 3, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/3299 | 2 |
| H01J37/32935 | 2 |
| H01J37/32091 | 1 |
| H01J37/32 | 1 |
| H01J37/00 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 1 |
| Physics | 1 |