Substrate processing apparatus and method of manufacturing semiconductor device
US-9082797-B2 · Jul 14, 2015 · US
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Yanai Hidehiro patents in 2015
Yanai Hidehiro was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Yanai Hidehiro |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Yanai Hidehiro in 2015.
Top CPC classifications
Most common classification codes for Yanai Hidehiro in 2015.
| CPC | Patents |
|---|---|
| C23C16/481 | 1 |
| F27B17/0025 | 1 |
| F27B5/14 | 1 |
| F27D2009/0056 | 1 |
| H01L21/02104 | 1 |
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