Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
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Moyama Kazuki patents
Moyama Kazuki holds 5 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 5 |
| Recent patents | 0 |
| First publication | Mar 10, 2015 |
| Latest publication | Mar 14, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Plasma etching method, method for producing semiconductor device, and plasma etching device
US-9324572-B2 · Apr 26, 2016 · US
Apparatus for plasma treatment and method for plasma treatment
US-9277637-B2 · Mar 1, 2016 · US
Plasma processing apparatus
US-9111726-B2 · Aug 18, 2015 · US
Plasma treatment device and optical monitor device
US-8974628-B2 · Mar 10, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Plasma etching method, method for producing semiconductor device, and plasma etching device
US-9324572-B2 · Apr 26, 2016 · US
Apparatus for plasma treatment and method for plasma treatment
US-9277637-B2 · Mar 1, 2016 · US
Plasma processing apparatus
US-9111726-B2 · Aug 18, 2015 · US
Plasma treatment device and optical monitor device
US-8974628-B2 · Mar 10, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32192 | 4 |
| H10P50/242 | 3 |
| H01J37/3244 | 3 |
| H01J37/32229 | 2 |
| H05H1/46 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 5 |
| Physics | 1 |