Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
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Morita Osamu — Electricity
Morita Osamu holds 3 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Morita Osamu |
| Technology | Electricity |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking Morita Osamu to Electricity.
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Plasma processing apparatus and substrate processing method
US-9237638-B2 · Jan 12, 2016 · US
Recent filings
Latest patents from Morita Osamu in Electricity.
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Antenna, dielectric window, plasma processing apparatus and plasma processing method
US-9595425-B2 · Mar 14, 2017 · US
Plasma processing apparatus and substrate processing method
US-9237638-B2 · Jan 12, 2016 · US
Related pages
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