Resist underlayer film forming composition containing silicon having sulfide bond
US-9217921-B2 · Dec 22, 2015 · US
Shibayama Wataru was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Shibayama Wataru |
| Year | 2015 |
| Patents | 2 |
Representative publications for Shibayama Wataru in 2015.
Most common classification codes for Shibayama Wataru in 2015.
| CPC | Patents |
|---|---|
| G03F7/11 | 2 |
| Y10T428/31663 | 2 |
| C07F7/1804 | 1 |
| C07F7/1836 | 1 |
| C08G77/26 | 1 |
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