Resist underlayer film forming composition containing silicone having cyclic amino group
US-11392037-B2 · Jul 19, 2022 · US
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Shibayama Wataru patents
Shibayama Wataru holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | May 5, 2015 |
| Latest publication | Jul 19, 2022 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Silicon-containing resist underlayer film forming composition having urea group
US-9760006-B2 · Sep 12, 2017 · US
Resist underlayer film forming composition containing silicon having sulfide bond
US-9217921-B2 · Dec 22, 2015 · US
Resist underlayer film forming composition containing silicon having nitrogen-containing ring
US-9023588-B2 · May 5, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Resist underlayer film forming composition containing silicone having cyclic amino group
US-11392037-B2 · Jul 19, 2022 · US
Silicon-containing resist underlayer film forming composition having urea group
US-9760006-B2 · Sep 12, 2017 · US
Resist underlayer film forming composition containing silicon having sulfide bond
US-9217921-B2 · Dec 22, 2015 · US
Resist underlayer film forming composition containing silicon having nitrogen-containing ring
US-9023588-B2 · May 5, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 4 |
| Chemistry & Metallurgy | 3 |
| Electricity | 3 |
| Cross-Sectional Technologies | 2 |