Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants
US-8993460-B2 · Mar 31, 2015 · US
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Lavoie Adrien patents in 2015
Lavoie Adrien was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Lavoie Adrien |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Lavoie Adrien in 2015.
Top CPC classifications
Most common classification codes for Lavoie Adrien in 2015.
| CPC | Patents |
|---|---|
| C23C16/4554 | 2 |
| H01L21/02274 | 2 |
| H01L21/0228 | 2 |
| H10P14/6336 | 2 |
| H10P14/6339 | 2 |
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