Double patterning lithography techniques
US-9142421-B2 · Sep 22, 2015 · US
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Sivakumar Swaminathan patents in 2015
Sivakumar Swaminathan was listed as an assignee on 3 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Sivakumar Swaminathan |
| Year | 2015 |
| Patents | 3 |
Patents
Representative publications for Sivakumar Swaminathan in 2015.
Top CPC classifications
Most common classification codes for Sivakumar Swaminathan in 2015.
| CPC | Patents |
|---|---|
| B82Y10/00 | 1 |
| B82Y40/00 | 1 |
| G03F1/36 | 1 |
| G03F1/70 | 1 |
| G06F17/5009 | 1 |
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