Self-aligned gate endcap (sage) architectures with gate-all-around devices having epitaxial source or drain structures
US-2020098878-A1 · Mar 26, 2020 · US
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Sivakumar Swaminathan patents
Sivakumar Swaminathan holds 9 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 9 |
| Recent patents | 0 |
| First publication | Feb 17, 2015 |
| Latest publication | Mar 26, 2020 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects
US-10211088-B2 · Feb 19, 2019 · US
Gate aligned contact and method to fabricate same
US-9716037-B2 · Jul 25, 2017 · US
Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging
US-9625815-B2 · Apr 18, 2017 · US
Pattern decomposition lithography techniques
US-9558947-B2 · Jan 31, 2017 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Self-aligned gate endcap (sage) architectures with gate-all-around devices having epitaxial source or drain structures
US-2020098878-A1 · Mar 26, 2020 · US
Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects
US-10211088-B2 · Feb 19, 2019 · US
Gate aligned contact and method to fabricate same
US-9716037-B2 · Jul 25, 2017 · US
Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging
US-9625815-B2 · Apr 18, 2017 · US
Pattern decomposition lithography techniques
US-9558947-B2 · Jan 31, 2017 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 9 |
| Operations & Transport | 3 |
| Physics | 3 |