Measurement apparatus, measurement method, and correction method
US-2017355532-A1 · Dec 14, 2017 · US
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Lasertec Corp patents in 2017
Lasertec Corp was listed as an assignee on 10 patent publications in 2017.
| Metric | Value |
|---|---|
| Company | Lasertec Corp |
| Year | 2017 |
| Patents | 10 |
Patents
Representative publications for Lasertec Corp in 2017.
Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method
US-9786057-B2 · Oct 10, 2017 · US
Inspection apparatus and its focus adjustment method
US-2017256045-A1 · Sep 7, 2017 · US
Mask inspection apparatus and mask inspection method
US-2017235031-A1 · Aug 17, 2017 · US
Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams
US-9719859-B2 · Aug 1, 2017 · US
Top CPC classifications
Most common classification codes for Lasertec Corp in 2017.
| CPC | Patents |
|---|---|
| G01N21/956 | 4 |
| G03F1/84 | 4 |
| G01N2021/95676 | 3 |
| G01N21/9501 | 3 |
| G01B9/02098 | 2 |
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