Measurement apparatus, measurement method, and correction method

Patent metadata

Field	Value
Publication number	US-2017355532-A1
Application number	US-201715620333-A
Country	US
Kind code	A1
Filing date	Jun 12, 2017
Priority date	Jun 13, 2016
Publication date	Dec 14, 2017
Grant date	—

Abstract

A measurement apparatus 1 according to the present invention includes a table 10 that has an axis of rotation 14 and supports a disc-shaped object 40 , a first driving unit that rotates the table 10 around the axis of rotation 14 , a light source 50 that produces illumination light with which an end portion 45 of the disc-shaped object 40 is illuminated, an objective lens 60 that collects the illumination light reflected from the end portion 45 , a second driving unit that moves the objective lens 60 along an optical axis 64 , an imaging unit 70 that captures an image of the end portion 45 by detecting the reflected light collected by the objective lens 60 , and an autofocus optical system 80 that determines a position of the objective lens 60 where the image of the end portion 45 is brought into focus in the imaging unit 70.

First claim

What is claimed is:

1 . A measurement apparatus comprising:
a table that has an axis of rotation and supports a disc-shaped object; a first driving unit that rotates the table around the axis of rotation; a light source that produces illumination light with which an end portion of the disc-shaped object is illuminated; an objective lens that collects the illumination light reflected from the end portion; a second driving unit that moves the objective lens along an optical axis of the objective lens; an imaging unit that captures an image of the end portion by detecting the reflected light collected by the objective lens; an autofocus optical system that determines a position of the objective lens along the optical axis where the image is brought into focus in the imaging unit; and a control unit that controls the first driving unit and the second driving unit, wherein the control unit moves the objective lens to the position determined by the autofocus optical system and adds predetermined additional data to data on the image.

2 . The measurement apparatus according to claim 1 , wherein the additional data is of a position of the end portion and of a position of the objective lens along the optical axis at the time when the image is captured.

3 . The measurement apparatus according to claim 1 , wherein
the imaging unit includes a plurality of pixels arranged in one direction, and the plurality of pixels image the end portion along the axis of rotation.

4 . The measurement apparatus according to claim 1 , wherein the control unit calculates an amount of eccentricity between the axis of rotation and the center of the disc-shaped object based on positions of the objective lens along the optical axis that are obtained by one turn of the disc-shaped object.

5 . The measurement apparatus according to claim 4 , further comprising a third driving unit that moves the table,
wherein the control unit moves the table based on the amount of eccentricity.

6 . A measurement method comprising:
placing a disc-shaped object on a table having an axis of rotation; rotating the table around the axis of rotation; illuminating an end portion of the disc-shaped object with illumination light; collecting the illumination light reflected from the end portion with an objective lens; capturing an image of the end portion by detecting the reflected light collected by the objective lens; determining a position of the objective lens where the image is brought into focus and which is a position along an optical axis of the objective lens by using an autofocus optical system; moving the objective lens to the position determined by the autofocus optical system; and adding predetermined additional data to data on the image.

7 . The measurement method according to claim 6 , wherein the additional data is of a position of the end portion and of a position of the objective lens along the optical axis at the time when the image is captured.

8 . The measurement method according to claim 6 , wherein a plurality of pixels arranged in one direction image the end portion along the axis of rotation.

9 . The measurement method according to claim 6 , wherein an amount of eccentricity between the axis of rotation and the center of the disc-shaped object is calculated based on positions of the objective lens along the optical axis that are obtained by one turn of the disc-shaped object.

10 . A correction method comprising:
placing a disc-shaped object on a table having an axis of rotation; rotating the table around the axis of rotation; illuminating an end portion of the disc-shaped object with illumination light; collecting the illumination light reflected from the end portion with an objective lens; capturing an image of the end portion by detecting the reflected light collected by the objective lens; determining a position of the objective lens where the image is brought into focus and which is a position along an optical axis of the objective lens by using an autofocus optical system; moving the objective lens to the position determined by the autofocus optical system; adding predetermined additional data to data on the image; calculating an amount of eccentricity between the axis of rotation and the center of the disc-shaped object based on positions obtained by one turn of the disc-shaped object; and moving the table based on the amount of eccentricity to correct the amount of eccentricity.

11 . The correction method according to claim 10 , wherein the additional data is of a position of the end portion and of a position of the objective lens along the optical axis at the time when the image is captured.

12 . The correction method according to claim 10 , wherein a plurality of pixels arranged in one direction image the end portion along the axis of rotation.

Assignees

• Lasertec Corp

Inventors

• Yamazaki Teruaki
• Jitsukawa Hiroyuki

Classifications

• G01B11/2408 Primary

  for measuring roundness · CPC title

• B65G47/24 Primary

  orientating the articles · CPC title

• G01N21/00

  Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light (G01N3/00 - G01N19/00 take precedence) · CPC title

• G01B11/00

  Measuring arrangements characterised by the use of optical techniques · CPC title