Sub-wavelength segmentation in measurement targets on substrates
US-9746785-B2 · Aug 29, 2017 · US
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Van Der Schaar Maurits patents
Van Der Schaar Maurits holds 7 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 7 |
| Recent patents | 0 |
| First publication | Mar 17, 2015 |
| Latest publication | Aug 29, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Lithographic system, lithographic method and device manufacturing method
US-9632430-B2 · Apr 25, 2017 · US
Inspection method for lithography
US-9494872-B2 · Nov 15, 2016 · US
Inspection apparatus and method for measuring a property of a substrate
US-9235141-B2 · Jan 12, 2016 · US
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus
US-9229338-B2 · Jan 5, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Sub-wavelength segmentation in measurement targets on substrates
US-9746785-B2 · Aug 29, 2017 · US
Lithographic system, lithographic method and device manufacturing method
US-9632430-B2 · Apr 25, 2017 · US
Inspection method for lithography
US-9494872-B2 · Nov 15, 2016 · US
Inspection apparatus and method for measuring a property of a substrate
US-9235141-B2 · Jan 12, 2016 · US
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus
US-9229338-B2 · Jan 5, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 7 |
| Electricity | 2 |
| Cross-Sectional Technologies | 1 |