Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
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Wack Daniel — Electricity
Wack Daniel holds 1 patent in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Wack Daniel |
| Technology | Electricity |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Representative patents
Notable publications linking Wack Daniel to Electricity.
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Recent filings
Latest patents from Wack Daniel in Electricity.
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
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