Source multiplexing illumination for mask inspection
US-9625810-B2 · Apr 18, 2017 · US
This page is not indexed by search engines while we improve data quality.
Wack Daniel patents
Wack Daniel holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Oct 20, 2015 |
| Latest publication | Apr 18, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Source multiplexing illumination for mask inspection
US-9625810-B2 · Apr 18, 2017 · US
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
US-9335637-B2 · May 10, 2016 · US
Temperature control in EUV reticle inspection tool
US-9164388-B2 · Oct 20, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 3 |
| Electricity | 1 |