Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
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Thach Senh — Electricity
Thach Senh holds 3 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Thach Senh |
| Technology | Electricity |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2017 |
Representative patents
Notable publications linking Thach Senh to Electricity.
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Recent filings
Latest patents from Thach Senh in Electricity.
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Related pages
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