Apparatus for treating surfaces of wafer-shaped articles
US-9548223-B2 · Jan 17, 2017 · US
Frank Dieter was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Frank Dieter |
| Year | 2017 |
| Patents | 1 |
Representative publications for Frank Dieter in 2017.
US-9548223-B2 · Jan 17, 2017 · US
Most common classification codes for Frank Dieter in 2017.
| CPC | Patents |
|---|---|
| H01L21/67051 | 1 |
| H01L21/6708 | 1 |
| H01L21/67115 | 1 |
| H01L21/67126 | 1 |
| H01L21/6719 | 1 |
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