Chemical modification of hardmask films for enhanced etching and selective removal
US-9870915-B1 · Jan 16, 2018 · US
Anthis Jeffrey W was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Anthis Jeffrey W |
| Year | 2018 |
| Patents | 1 |
Representative publications for Anthis Jeffrey W in 2018.
Most common classification codes for Anthis Jeffrey W in 2018.
| CPC | Patents |
|---|---|
| B82Y30/00 | 1 |
| C08K3/04 | 1 |
| H01J2237/334 | 1 |
| H01J37/32009 | 1 |
| H01J37/3244 | 1 |
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