Chemical modification of hardmask films for enhanced etching and selective removal
US-9870915-B1 · Jan 16, 2018 · US
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Anthis Jeffrey W patents
Anthis Jeffrey W holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Jan 6, 2015 |
| Latest publication | Jan 16, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Chemical modification of hardmask films for enhanced etching and selective removal
US-9870915-B1 · Jan 16, 2018 · US
Bisamineazaallylic ligands and their use in atomic layer deposition methods
US-9127031-B2 · Sep 8, 2015 · US
Methods for manufacturing high dielectric constant films
US-8927438-B2 · Jan 6, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 3 |
| Electricity | 2 |
| Operations & Transport | 1 |