PEALD of films comprising silicon nitride
US-9984868-B2 · May 29, 2018 · US
Nguyen Victor was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Nguyen Victor |
| Year | 2018 |
| Patents | 1 |
Representative publications for Nguyen Victor in 2018.
US-9984868-B2 · May 29, 2018 · US
Most common classification codes for Nguyen Victor in 2018.
| CPC | Patents |
|---|---|
| C23C16/045 | 1 |
| C23C16/345 | 1 |
| C23C16/45542 | 1 |
| C23C16/56 | 1 |
| H01L21/0217 | 1 |
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