Reducing MEMS stiction by introduction of a carbon barrier
US-9463973-B2 · Oct 11, 2016 · US
Steimle Robert F holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Steimle Robert F |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Notable publications linking Steimle Robert F to Physics.
US-9463973-B2 · Oct 11, 2016 · US
US-9463973-B2 · Oct 11, 2016 · US
US-9463973-B2 · Oct 11, 2016 · US
US-9290380-B2 · Mar 22, 2016 · US
US-9290380-B2 · Mar 22, 2016 · US
Latest patents from Steimle Robert F in Physics.
US-9463973-B2 · Oct 11, 2016 · US
US-9463973-B2 · Oct 11, 2016 · US
US-9463973-B2 · Oct 11, 2016 · US
US-9290380-B2 · Mar 22, 2016 · US
US-9290380-B2 · Mar 22, 2016 · US
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